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> Tel/tokyo electron php hot plate module for act 12
Tel/tokyo electron php hot plate module for act 12
Tel/tokyo electron php hot plate module for act 12
TEL/Tokyo Electron PHP Hot Plate for an ACT 12 CleanTrack Photo-Resist Developer/Coater System
Comes with what you see in the pictures. If you don't see it, you probably wont get it.
Specifications are from Tokyo Electron and may vary slightly due to upgrades, options, or revisions this unit may or may not have.
* Part Number: 2987-451227-W1, Description: PHP(ACT12-L)-I Unit
* According to paperwork with the part, the PHP plate has a small chip at the edge of one of the pin holes. A wafer in the pincette broke pins and one of the pins hit the edge of the pin hole and chipped it.
For More Pictures Please Click the Following:
Temporary Email: J_Mcneil@dontscrapit.com (Jeanine Mcneil)
