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New advanced energy pdx 500 rf plasma generator (ae)
New advanced energy pdx 500 rf plasma generator (ae)
NEW Advanced Energy PDX 500 RF Plasma Generator
Comes with a manual and what you see in the pictures. If you don't see it, you probably wont get it.
Specifications are from Advanced Energy and may vary slightly due to upgrades, options, or revisions this unit may or may not have.
Power Requirements: 200 - 230 V ~, 50/60 Hz, 1.4 kW
* DC Sputtering with RF Bias
The PDX plasma generator supplies 500 W maximum power at 325 to 375 kHz. It provides fully integrated instrumentation and load matching. The RF output is sinusoidal and, at full-rated power, all harmonics are 45 dB below the fundamental output frequency. The PDX is well suited to chemical vapor deposition (CVD), etching, dielectric sputtering, and plasma polymer applications where precise control of power is mandatory to optimize electrical moding, specific specie production, control of stress, and gas transport interactions.
The PDX power-conversion technique stores virtually no energy at the output, and, with proper system shielding techniques, produces little EMI/RFI. The PDX is equipped with a standard internal power line filter.
The PDX arc-suppression circuit turns off RF power in less than 2 µs. This fast response, combined with the very low stored energy at the output, eliminates direct damage and particulate contamination.
The PDX operates continuously into a load mismatch range without harm or oscillation; in such cases load power is reduced.
The PDX can be controlled locally through the PDX front panel or remotely through the User connetor. One switch on the front panel allows you to select remote or local control for all functions except frequency adjust and tap select, which are always controlled from the front panel.
Control Signal Sources: Output can be controlled from the front panel or by remote signals provided to the Generator User connector. A front panel switch selects the method of control for most functions. (The frequency adjust and tap select functions are always controlled from the front panel.)
Methods of Output Regulation: The PDX regulates output based on either forward or load power. In forward power regulation, the forward power measured at the output connector remains constant. In load power regulation, the forward power measured at the output connector can vary to keep the power dissipated in the load constant.
Power Measurements: The PDX measures and displays forward/load power, reflect power, and setpoint.
Load Matching: The output has a load-matching transformer. The transformer's seven taps allow the PDX to efficiently transfer power. The PDX 500 has a load-matching range of 10 to 50 ohms (unbalanced).
Fault Conditions: Three conditions cause the PDX to shut off output power: overtemperature, line fault, and arc (if arch latch is active). Fault conditions are indicated by two LEDs on the front panel and one LED on the rear panel.
Limit Conditions: Limit conidtions require attention, but do not shut off output power. A limit condition has occurred if the setpoint LED is not lit for output power above 50 W. The five possible conditions are voltage limit, current limit, reflected power limit, forward power limit, and arc (if arc latch is not active).
Size: 3.5" H x 19" W x 20" D (8.9 cm H x 48.3 cm W x 50.8 cm) - Does not include packaging!
Weight: 30 lbs. (13.6 kg) - Does not include packaging!
User Connector: 25-pin, male, subminiature-D
RF Output Connector: Type N.
Load-Matching Output Connetor: Type N.
Input Connector: Hubble 2621. (North America Only.)
RF Output Power: 8 W minimum, 500 W maximum, accuracy is 1% of setpoint or 2 W, whichever is greater.
Reflected Power: 250 W maximum (measured before loadmatch transformer.
Regulation: Forward or Load power regulation modes.
Harmonics: At 900 W at 350 kHz (into a 50 ohm load), all harmonics are nominally greater than 45 dB below the fundamental output frequency.
Frequency Range: 325 to 375 kHz.
Output Voltage for 50 ohm Output: 300 V maximum.
Output Voltage for Output A: 850 V maximum.
Output Current: 6.0 A maximum.
Load Impedance: 10 to 50 ohms (7 steps) loadmatch transformer.
Input Voltage: 200 to 230 V ac, 50/60 Hz, single phase.
Input Current: 10 A rms maximum at 200 V ac input.
Line Input Connection: 3-wire, 14 AWG with Hubble connectors. (North America only. No line cord or connector is provided for European units.)
Internal Power Dissipation: 250 W maximum.
Environmental Specifications:
Operating: Class 3K3. Minimum 0°C, maximum 40°C (maximum value of average over 24 hr.: 35°C). If the units are enclosed in cabinetsm ensure that the maximum ambient temperature is not exceeded.
Storage: Class 1K4. Minimum -25°C, maximum 55°C.
Transportation: Class 2K3. Minimum -25°C, maximum 55°C (for short periods of up to 24 hr., the maximum 70°C)
Humidity: Class 3K3. 5 to 85% relative humidity; no condensation or icing.
Operating: 800 mbar minimum (approx. 2000 m above sea level).
Storage: 800 mbar minimum (approx. 2000 m above seal level).
Transportation: 660 mbar minimum (approx. 3265 m above sea level).
Pollution Degree: Two. Only non-conductive pollution occurs.
Temporary Email: JShepard@dontscrapit.com (Jody Shepard)
