DO NOT SCRAP IT! MODERATED NATIONAL EXCHANGE NEWSGROUP FOR SALVAGERS > Pennsylvania
> Construction
> Tylan mykrolis celerity fc-2960M mass flow controller
Tylan mykrolis celerity fc-2960M mass flow controller
Tylan mykrolis celerity fc-2960M mass flow controller
NEW Tylan / Millipore / Celerity / Mykrolis FC-2960M Mass Flow Controller (051206602150)
This does not mean that the unit doesn’t work, only that we have not tested or checked it out.
This may also mean that we are not knowledgeable in that specific item.
Please call MONIQUE Toll Free at 1-866-MHZ-ELEC (1-(***)-649-3532) if you have questions
between the hours of 9:00 AM and 4:00 PM Monday thru Friday Pacific Time.
The Item may vary from picture as manufacture may change model appearance.
All information, including description, specifications and features are from a manufacturers
data sheet or manual and are subject to change without notice.
Meaning that all information included in the description, specifications and features
What you see is what you get! If it doesn’t show it you probably won’t get it!
NEW Tylan / Millipore / Celerity / Mykrolis FC-2960M Mass Flow Controller
* Elastomer-free, all metal flow path
* Normally open thermal valve
* Proven high performance electronics package
* Designed specifically to meet the exacting ultra-clean demands of semiconductor processes with long run times requiring normally open valves, the Tylan FC-2960M mass flow controllers represent another advance in clean technology. The Tylan FC2960 mass flow controller uses the same annular bypass, simple flow paths and stable sensor as the Tylan FC2950M, replacing the valve with a normally open thermal valve. Dead spaces and trapped volumes are minimized, virtually eliminating contamination contributed by the mass flow controller and providing for short pump-down times.
* Starting with an aerodynamic, annular bypass that is welded into the base and a frictionless thermal valve, the dead spaces and trapped volumes have been minimized. The flow paths were designed for manufacturing in the machining and electropolishing processes which leads to lower costs and higher performance. The standard surface finish throughout the gas wetted paths is 0.5 µm (20µinch) Ra,max with an option for a 0.13 µm (5µinch) Ra,max.
Elastomer Free, All Metal Flow:
* The Tylan FC-2960M mass flow controller base, bypass and fittings are made from 316L VIM/VAR to ensure a pure starting material and improve the final surface finish of the product. The valve uses a sapphire seat, wetted path and greatly reducing a major source of outgassing and particulate contaminants.
Normally Open Thermal Valve:
* The Tylan FC2960M mass flow controller uses our unique normally open thermal valve to control the gas flow. The flow path is fully swept with no dead space. The thermal valve offers outstanding stability that is particularly well suited to processes running over extended time periods. Because the valve is normally open, the mass flow controller can be purged when there is no power applied to the controller.
High Performance Electronics:
* The Tylan FC2960M mass flow controller incorporates its proven electronics for enhanced process stability. The electronics offers selectable auto-zero and reduced ambient temperature coefficients for increased flow stability. The Tylan FC-2960M mass flow controller gas a 20-pin card edge connector.
* Full Scale (N2 Equivalent): 10 SCCM – 20 SLM
* Step Response Time: 6 sec (dependent on step request and conditions)
* Accuracy: ±1.0% full scale
* Linearity: ±0.5% full scale
* Repeatability: ±0.2% full scale
* Reproducibility: ±0.3% full scale/10 weeks
* Attitude Sensitivity: <0.25% at 90° Celsius without auto-zero
* Temperature Coefficient: 0.05% per °Celsius zero and span
* Pressure Coefficient: 0.00001% per bar, 0.007% per PSI (typical)
* Supply Voltage: ±15 Volts DC nominal ±20%
* Power Supply Sensitivity: <0.01% per volt
* Supply Current: 180 mA max.
* Power Consumption: 4.0 watts (max.)
* Input/Output Signal: 0 – 5 Volts DC
* Input Impedance: 500K ohms (minimum)
* Minimum Load Impedance: 2000 ohms
* Valve: Normally-open, metal sealed thermal
* Materials: 316L VIM/VAR, 316L stainless steel, sapphire, nickel 200
* Leak Integrity: 5 x 10-11 atm-cc per sec (He) inboard
* Leak Through the Valve: <2% full scale
* Fittings: ¼†and ?†VCR® compatible fitting, ¼†butt weld
* Surface Finish: Standard – 0.5 µm (20µinch) Ra,max; EP5 – 0.13 µm (5µinch) Ra,max
* Operating Temperature: 0 – 50 °Celsius (ambient and gas)
* Humidity: 0 – 95% RH, non-condensing
* Maximum Operating Pressure: 11.35 bar (150 PSIG)
* Differential Pressure: Nominal 0.7 – 2.75 bar (10 – 40 PSID) 6 liters and above 15 – 40 PSID
***All specifications subject to change without notice***
Temporary Email: marvacarter@dontscrapit.com (Marva Carter)
