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> Advanced energy apex 5513 5.5KW rf generator (ae)
Advanced energy apex 5513 5.5KW rf generator (ae)
Advanced energy apex 5513 5.5KW rf generator (ae)
Advanced Energy APEX 5513 5.5kW RF Generator
Comes with what you see in the pictures. If you don't see it, you probably wont get it.
Specifications are from Advanced Energy and may vary slightly due to different configurations, upgrades, options or revisions this unit may or may not have.
Found these units in our warehouse. Unknown condition. No way to test. I was told this was a 5.5kW unit by the factory. Model Tag may say 5513 or 5500/13 shown in the pictures below (because we have quantity available).
Link to Data Sheet: Click here!
Part Number: A3F1A060GA110A000A
F/R: A or C (F/R A is 13.0 Amps and F/R C is 15.0 Amps on Input Power and maybe more)
Input Power: ~400V, 3 Phase, PE 50/60 Hz, 15.0 A (or 13.0 A)
The Part Number Indicates the following:
Output Frequency: 13.56 MHz, +/- 0.005%
Input Voltage: 400 V nominal, 360 to 440 VAC, 3 phase, 47 to 63 Hz, with breaker
Packaging: Frame Mount (< or = to 5500 W)
Panel: none (on-board, frame mount)
Serial I/O: exclusive option #3
Serial Port 2: default (no secondary serial port)
User Port Options: exclusive option #4
On-board RF output connector location: utilities end (near water connections)
Output Connector: 7/16 Connector
Water Fitting Threads: default to 3/8 BSP female (metric threads)
Custom Configuration: Standard Configurations
Versatile Apex® RF generators and power delivery systems provide remarkably high power density and power delivery consistency. This sophisticated RF-conversion technology not only offers enhanced product and process reliability, but also increases cost effectiveness by eliminating the need for front-end DC-to-DC conversion components. For superb performance in plasma-based, thin-film processes for the manufacture of semiconductors, data storage devices, and flat panel displays, the Apex platform is the ideal choice. With its unique modular design—in a package so trim that it can be mounted directly on the chamber—the Apex platform is also highly customizable to suit your specific process needs.
* Higher power density—up to 400% over conventional RF generators
* Greater delivered power repeatability
* On-board chamber mount, on-tool frame mount, rack mount, and shoebox options
* Double the MTBF of typical system configurations
* Wide-band control loops and optional, high-repetition-rate pulsing
* Multiple communication options
RF Output Power and Regulation:
* 5.5kW forward / delivered power into a 50 ohm non-reactive
* 3350 W forward power into a 2:1 VSWR load
* 1900 W forward power into a 3:1 VSWR load
Harmonics: All full-rated output, -40 dBc forward/load when operated into 50-Ohm non-reactive load.
Forward Power Regulation: +/- 1% of set point or +0.1% full-rated output power, whichever is greater, when measured into a 50-ohm non-reactive impedance.
Load Power Regulation: 2.5% of the load power into a 3:1 VSWR non-reactive load.
Ambient Operating Temperature: 5°C (41°F) min, 40°C (104°F) max.
Water Cooling Temperature: 35°C (95°F) max.
The Model Number Tags May Be Either of These (because we have quantity available):
Temporary Email: adela_bray@dontscrapit.com (Adela Bray)
