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Ulvac vacuum pump pks-016 & booster pmb 003CM vacum
Ulvac vacuum pump pks-016 & booster pmb 003CM vacum
This Vacuum System was operated in SAMSUNG site in Budapest, Hungary.
Used vacuum pump system made by ULVAC Japan.
Each system contains components as follows:
1) Oil rotary vacuum pump PKS series model PKS-016
2) Mechanical booster pump PRC-A series model PMB-003CM
Oil Rotary Vacuum Pumps (technical information from ULVAC website)
PKS Series Oil Rotary Vacuum Pumps
The PKS Series are large oil rotary vacuum pumps that are extremely solid and have stable evacuation characteristics. They are used in many applications, in areas ranging from the metal and automotive industries, to the chemical, pharmaceutical and food industries.
* Kinney 1-phase structure is solid and has long life.
* Made from high-grade cast metal, for outstanding abrasion and corrosion resistance
* Extremely easy to disassemble and assemble. Evacuation valve inspection is also easy.
Outlet/inlet differential pressure (MPa)
Total length x total width x total height (mm)
Operating instructions (1 copy), base bolts (4),
oil for 1 motor, motor pulley (1)
This catalog uses SI measurement units. Conversion to non-SI units is as follows :
Final pressure : 2.7 Pa = 2 x 10-2 torr; Water pressure: 0.3 MPa = 3 kg/cm2
Measured by Pirani vacuum gauge (about 6.7 x 10-1 Pa with MacLeod vacuum gauge)
When ordering, specify whether you require a motor, and if you do, specify its type, voltage and frequency. Totally enclosed fan-cooled flange motors, increased safety flange motors, and explosion-proof flange motors are available as options.
Other oil types are available. Contact ULVAC's Sales Department.
Mechanical Booster Pumps (technical information from ULVAC website)
PMB-B/C Series Mechanical Booster Pumps
By using them together with dry pumps, oil rotary vacuum pumps or water-sealed pumps, mechanical booster pumps can increase the evacuation speed in the 1 kPa to 0.1 Pa range, where rough pump evacuation speed drops. The models in the PRC-A Series are the successors to ULVAC's PMB-006C(M), and PMB-012C(M) models. Like the PMB-C(M) Series, they are Roots pumps designed for general-purpose applications, as well as semiconductor and LC manufacturing processes that require a highly clean atmosphere inside and outside the pump. The PMB-C Series is ideal for general-purpose applications and clean applications. The PMB-B Series is ideal for large-capacity evacuation, such as for heat treatment furnaces and melting furnaces.
No lubrication oil in casing chamber, enabling stable performance for water vapor or solvent vapor.
Major components are Tufram®-processed, for high surface hardness and outstanding corrosion resistance. Tufram®-processed components reduce damage and corrosion inside pump. (Tufram® process is used on PRC-A Series and PMB-C(M) Series.)
* PMB-CM/PRC-A (effective at achieving faster evacuation) can be started at same time as rough pump driven by atmospheric pressure, enabling faster evacuation than standard type.
* Evacuation direction can be selected (PMB-024C(M), 040B, 060B).
Vertical or horizontal evacuation direction can be selected, for more compact systems with greater design freedom.
Effective evacuation speed (m3/h(L/min)) (*1)
Maximum permitted pressure difference (Pa; PMB-C only)(*2)
Supported drive pressure (Pa) (*4)
Outlet/inlet differential pressure (MPa)
External dimensions (L x W x H; mm)
Atmospheric pressure drive type
Lubrication chamber evacuation support
(5 minutes or less at startup)
Maximum permitted pressure difference (Pa; PMB-C only) (*2)
Supported drive pressure (Pa) (*4)
Motor power (kW) (number of poles) (*5)
Outlet/inlet differential pressure (MPa)
External dimensions (L x W x H; mm)
Atmospheric pressure drive type
Lubrication chamber evacuation support
This catalog uses SI measurement units. Conversion to non-SI units is as follows :
Final pressure : 4.0 x 10-1 Pa = 3.0 x 10-3 torr
Pressure: 0.05/0.1/0.2/0.3 MPa = 0.5/1/2/3 kgf/cm2
With optional large-capacity motor, the intake pressure and pressure difference can be increased.
Measured by Pirani vacuum gauge (standard auxiliary pump and oil).
4.0 x 10-2 Pa with MacLeod vacuum gauge
For PMB-024CM, set the repeated evacuation time for air/vacuum (›655 Pa) to no more than 5 minutes, and the interval to the next evacuation process to at least 5 minutes.
200 VAC 50/60 Hz; 200 VAC 60 Hz; 3-phase
Pump oil types other than the standard type are available. Contact ULVAC.
Oil volume values in parentheses ( ): For models performing evacuation in horizontal direction
W = width, D = depth, H = height
Weight values in parentheses ( ): Values for CM models
PRC Series models are not available as explosion-proof types or increased safety types.
You can contact me at S_Mccormick@dontscrapit.com or at: (***) 441 8941 if you have any questions.
ITEM IS LOCATED IN BUDAPEST, HUNGARY
Temporary Email: S_Mccormick@dontscrapit.com (Summer Mccormick)
